MEMS-4-MMIC Fact Sheet

  • Project Name: MEMS-4-MMIC   
  • Project Title: Enabling MEMS-MMIC technology for cost-effective multifunctional  RF system integration
  • EU Project Number: 224101
  • Total Project Budget: 3,802,295 €
  • Consortium Members: IMST, FOI, VTT, OMMIC, SMS, IMT, IEMN
  • Project Duration: 3.5 years, kick-off May 1st, 2008
  • FP7 Call: STREP, ICT Challenge 3:Components, Systems and Engineering Micro/Nanosystems, FP7-ICT-2007-2
  • Project Summary: The development of MEMS resistive switches suitable for integration on MMIC. These components can  be used to design phase-shifters, tuneable LNA, and other building blocks for terminal frontends.


Over the last few years RF Micro-Electro-Mechanical-System switches (MEMS) have made tremendous progress in technology development and RF applications. These circuits have been so successful that they are now essential building blocks in next-generation RF communication and sensor systems. The integration of RF-MEMS switches and MMIC (Monolithic Microwave Integrated Circuits) is the next logical – and cost effective – step in MMIC development. The MEMS-4-MMIC project aims at the physical merging of the innovative RF-MEMS switch technology with proven MMIC technology to create highly integrated, multifunctional building blocks for high- value applications, such as reconfigurable telecommunication systems, phased arrays for mobile satellite platforms and radar, multimedia WLAN systems, and cognitive radio. Future agile RF frontends will use the available RF spectrum more efficiently. The first generation of RF-MEMS MMIC components will be based on the requirements for next-generation wireless smart applications, automotive radar, satellite terminals, high-speed WLAN and cognitive radio frontends. The MEMS-4-MMIC project will examine the whole value chain of RF-MEMS MMIC components, starting with materials and suitable foundry processes, RF design, packaging of RF-MEMS MMIC (at wafer- and die-level), and ultimately, testing and reliability studies, which are an essential element in the complete manufacturing and commercialization process. This is why one of Europe’s leading GaAs MMIC foundries is part of the consortium. Within the project, RF-MEMS MMIC designs will target resistive switches at frequencies up to approximately 40 GHz for Approval for Market Introduction (AMI).