Coplanar Thinfilm Resistor C_TFR

Notes :

The first example makes evident, that it is impossible to realize high resistor values, if only a low sheet resistivity is available. The input impedance is decreasing with about 1/freq. These measurements have been made with more care to achieve less ripples especially at higher frequencies. The circuit dimensions are the same, although the sheet resistivity decreases to 400W/square. In the third example, the desired resistor value of 50W was not achieved, because a sheet resistivity of about 275W/square was expected. Such small resistor areas are independent of the frequency.

Configuration: Technology: FBH Berlin 50W line at the port, line parameter: W=40, S=30, D=150mm Resistor parameter: WR=5mm, LR=64mm, RS=490W/square Desired resistivity: R = 6kW

Configuration: Technology: FBH Berlin 50W line at the port, line parameter: W=40, S=30, D=150mm, feed line length=30mm Resistor parameter: WR=33mm, LR=6mm, RS=400W/square

Configuration: Technology: FBH Berlin 50W line at the port, line parameter: W=40, S=30, D=150mm Resistor parameter: WR=17mm, LR=3.1mm, RS=450W/square Desired resistivity: R = 50 W

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