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| Parameter | Discreption | Range of Usage | 
| via_ol | Overlap for inter metal via | ³ 0 | 
| cond_os | Oversize of metal layer 1 (cond) | ³ 0 | 
| cond_wm | minimum width of metal layer 1 (cond) | ³ 0 | 
| cond_sm | minimum slot of metal layer 1 (cond ) | ³ 0 | 
| cond2_os | Oversize of metal layer 2 (cond2) | ³ 0 | 
| cond2_wm | minimum width of metal layer 2 (cond2) | ³ 0 | 
| cond2_sm | minimum slot of metal layer 2 (cond2) | ³ 0 | 
| resi_os | Oversize of resi-layer | ³ 0 | 
| diel_os | Oversize of dielectric layer 1 | ³ 0 | 
| diel2_os | Oversize of dielectric layer 2 | ³ 0 |